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產(chǎn)品名稱(chēng): 日本YAMATO低溫等離子灰化機(jī)
產(chǎn)品型號(hào): PR300/301 Low
產(chǎn)品展商: 其它品牌
產(chǎn)品文檔: 無(wú)相關(guān)文檔
簡(jiǎn)單介紹
日本YAMATO低溫等離子灰化機(jī) PR300/301 本產(chǎn)品是用等離子來(lái)進(jìn)行表面處理的專(zhuān)業(yè)裝置。桌臺(tái)式，具有高性能，力求操作簡(jiǎn)便，快捷，可顯示數(shù)據(jù)。廣泛應(yīng)用于以電子材料為中心的各個(gè)行業(yè)中。用途:用于CSP、BGA、COB、基板的等離子處理。消除有機(jī)膜，金屬氧化膜。用于印刷電路板的干式清洗。界面活性處理。
日本YAMATO低溫等離子灰化機(jī)
的詳細(xì)介紹
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Model
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300
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301
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Method
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Barrel type of DP
DP : direct plasma
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High-frequency Output
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Max.300W
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Oscillating Frequency
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13.56MHz
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Reaction Chamber
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ø64×160mm
3 chambers
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ø118×160mm
1 chamber
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The PR 300 is a gas plasma device that is used widely for such applications as production of semiconductors and analysis work.（PR300型等離子灰化機(jī)是一種廣泛應(yīng)用于半導(dǎo)體分析工作上的氣體等離子裝置。） It boasts outstanding operability and safety,（有著十分突出的可操作性和**性） with an automatic tuning system as a standard component and other features. It has a compact design（小型化設(shè)計(jì)）, with a small-size HF generator and an oscillation section integrated with a portion of the chamber,（配有小型高頻發(fā)生器和振蕩部件的綜合性工作室） allowing it to be installed into a 19-inch rack.（允許放置19英寸支架）
- Three 64mm diameter chambers are included. (PR300)
- The unit can be set for a wide range of output conditions to handle a variety of testing samples.
- One 118mm diameter large chamber is accommodated.
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The gas plasma equipment has a wide range of applications from ashing, etching, dry cleaning, etc.
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 Operation Flowchart |
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| Piping System Diagram (PR300) |
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Specifications
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Model
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PR300
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PR301
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Method
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Barrel type of direct plasma
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Control part
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High frequency output
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300W variable (100W×3 chambers)
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Oscillating frequency
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13.56 MHz
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Output impedance
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50Ω
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Tuning method
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Manual biaxial tuning method
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Instrument
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Output watt meter (0 to 300W)
Reflected wave watt meter (0 to 100W)
Vacuum gauge, bourdon's tube type
Flow meter, needle valve integrated type, 1 set
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Timer
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0.1sec. to 999h
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Gas inlet
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1/4" stainless steel
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Power source (50/60Hz)
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AC 100/220V, single phase, 1 kVA
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Reaction part
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Reaction chamber
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Made of super hard glass, ø64×160mm×3 chanbers
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Made of pyrex glass, ø118×160mm
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Electrode structure
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Condenser type, 2-way split
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Control system
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Auto pressure reduction, auto leak valve
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Piping material
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Stailess steel, Teflon, Copper and Brass
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Stainless steel, Teflon
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External dimensions(W×D×Hmm)
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438×520×556
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438×520×656
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Weight
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Approx. 38kg
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Approx. kg
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Standard Accessories
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- Vacuum grease :1 container
- O-ring for reaction chamber :6 pcs.
- Sample dish (large and small) :each 4sets
- Lid for reaction chamber :4 sets
- Adapter for ground :1 pc.
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Optional Accessories
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Sample dish (large) Sample dish (small) Sample shelf Stand
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