|
型號(hào)
|
V-1000
|
V-1000X（雙工作臺(tái)）
|
V-1000XS
|
|
等離子工作模式
|
RIE and DP
|
|
主件
|
|
電極結(jié)構(gòu)
|
平行平板式
|
|
平臺(tái)尺寸
|
280mmW×280mmD
|
300mmW×300mmD(Double stage)
|
400mmW×375mmD
|
|
工作室尺寸
|
400mmW×400mmD×380mmH
|
400mmW×400mmD×380mmH
|
600mmW×554mmD×440mmH
|
|
真空測(cè)量
|
電容壓力計(jì)
|
|
反應(yīng)氣體系統(tǒng)
|
雙系統(tǒng)
|
|
控制器
|
Programmable controller
|
|
顯示屏
|
Programmable terminal (touch panel)
|
|
射頻能量供應(yīng)
|
|
輸入
|
AC 200/220/380V,Three phase,
|
|
高頻輸出功率
|
1,000W
|
1,000 & 1,500W
|
|
發(fā)振器
|
水晶發(fā)振
|
|
發(fā)振頻率
|
13.56 MHz
|
|
匹配調(diào)節(jié)
|
自動(dòng)調(diào)整
|
|
真空泵 (Vacuum Pump)
|
|
Displacement （置換量）
|
670 & 1,000 liters/min.
|
670 & 1,500 liters/min.
|
1,000 & 1,500 liters/min.
|
|
Inlet configuration(進(jìn)口配置)
|
NW40 with a flexible stainless steel hose (1 meter long)
|
|
Outlet configuration（出口配置）
|
NW40
|
|
氣體系統(tǒng)（Gas Systems）
|
|
Purge gas（凈化氣體）
|
Nitrogen (N2) and a regulator (3 kgf/cm2) with a manometer
|
|
Driving gas（推進(jìn)氣體）
|
Air or nitrogen (N2) and a regulator (alarm contact at 10 kgf/cm2) with a manometer
|
|
Reaction gas G1（反應(yīng)氣體1）
|
Oxygen (O2) and a mass flow controller (1000 secm)
|
|
Reaction gas G2（反應(yīng)氣體2）
|
Argon (Ar) and a mass flow controller (100 secm)
|
|
Safety Mechanisms（**機(jī)構(gòu)）
|
|
System Protections（系統(tǒng)保護(hù)）
|
*Oscillator protection circuit *Front-door interlock switch (interlocked with the startup)
*Safety switches (interlock switch on the side panels) *Vacuum leak test function
*Air-purge end buzzer *Alarm buzzer *Emergency stop push-button switch
|
|
Actions against a trouble of the vacuum pump（真空泵故障反應(yīng)）
|
The plasma scrubber takes the counteractions listed below and show an Alarm message on its display when something wrong happens on the vacuum pump.
*The main valve closes *The gas feed valve closes *The isolation valve closes
*The oscillator stops outputting *Treatment process is suspended *The Alarm buzzer starts sounding
* The alarm indicator lamp lights up to notify the trouble of the vacuum pump
*The treatment process timer stops
|
|
REQUIRED UTILITIES（必要的配套設(shè)施）
|
|
Power Supply（電源供應(yīng)）
|
|
Main unit with vacuum pump
（配真空泵主機(jī)）
|
Three phases, AC220V, 30 A, 60Hz (with an accessory power cable of 3 meters long, and exposed crimp-style terminals of 8 millimeters long)
|
|
Gases（氣體）
|
|
Driving gas （推進(jìn)氣體）
|
Air or nitrogen (N2) (Feed pressure: 5～7 kgf/cm2)
|
|
Purge gas（凈化氣體）
|
Nitrogen (N2) (Feed pressure: 2～7 kgf/cm2)
|
|
Reaction gas G1（反應(yīng)氣體1）
|
Oxygen (O2) (Feed pressure: 1.5 kgf/cm2)
|
|
Reaction gas G2（反應(yīng)氣體2）
|
Argon (Ar) (Feed pressure: 1.5 kgf/cm2)
|
|
Connection port（連接端口）
|
1/4" swagelok joint bulkhead union (SS-400-61)
|
|
|
Note: Pressure regulators, filters and other protective devices shall be prepared by others.
|
|
Connection Diameter of the Discharge Duct (and inlet Port)（ 流注輸送管口徑）
|
|
Vacuum pump's inlet port
|
NW4O (with a flexible stainless steel hose of 1 meter long)
|
|
Vacuum pump's outlet port
|
NW4O
|
|
Main unit's ozone outlet port
|
163mm diameter
|
|
Oscillator's ventilation port
|
163mm diameter
|
|
|
Note: Every port has a connector designed for a flexible hose. Connect a duct to these inlet and outlet ports.
|
